MEMS raster correction scanner for SXGA resolution retinal scanning display

摘要

A high-frequency resonant horizontal scanner and a linearly driven vertical scanner at display frame rates can create a 2-D raster for video display. The combined motion of the two scanners forms a sinusoidal raster in the vertical direction where the raster line spacing is uniform only at the center and becomes progressively nonuniform towards the left and right edges of the display screen. Nonuniformities degrade the image quality and can be corrected by the addition of a third scanner to the system. Last year we reported the requirements and some of the early results in our MEMS-based raster correction scanner development effort. Since then, a lot of progress was made and the scanner was successfully incorporated into an SXGA resolution helmet-mounted display system. In this paper we report the results of thick copper coil development, new coil and magnet design for electromagnetic actuator, thermal flatness testing, new mounting design, and finally the performance measurements for the HMD system with a raster correction scanner.